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A improved muitilayer co-firing piezoelectric ceramics micro-motor

机译：一种改进的Muitilayer共烧压电陶瓷微电机

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摘要

An improved rotary piezoelectric micro-motor is studied in this paper.Different from the conventional traveling wave ultrasonic motor using a monolithic piezoelectric ceramic ring,several multilayer piezoelectric ceramic bulks (1.5mm×3mm×5mm) are obtained by low temperature co-fired technique and used to generate transverse vibration inside the ring type stator.The layout and electric signals applied to the piezoelectric ceramic bulks are designed for the purpose of generating elliptical trajectories on the teeth of the stator.The working mode of the prototype motor is simulated by the finite element method,and also measured by the Doppler Laser Vibrometer.It is shown that experimental results are in good agreement with simulation,which verifies the effectiveness of the finite element model.The prototype micro-motor could be driven at the low voltage of 15V under the frequency of 57.6 KHz.
机译：本文研究了一种改进的旋转压电微电机。通过使用单片压电陶瓷环的传统行波超声波电机从传统的行进波超声波电动机进行了分化的，通过低温共用技术获得了几种多层压电陶瓷块（1.5mm×3mm×5mm）并用于在环型定子内产生横向振动。施加到压电陶瓷块的布局和电信号的设计是为了在定子的齿上产生椭圆轨迹的目的。模拟原型电动机的工作模式有限元方法，并通过多普勒激光振动计测量。图表显示了实验结果与仿真吻合良好，这验证了有限元模型的有效性。原型微电机可以在15V的低电压下驱动。在57.6 kHz的频率下。

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