首页> 外文会议>International symposium on System synthesis >Argon and air mixture plasmas produced by a radiofrequency plasmasource
【24h】

Argon and air mixture plasmas produced by a radiofrequency plasmasource

机译:射频等离子体产生的氩气和空气混合物等离子体资源

获取原文

摘要

Summary form only given. A radiofrequency helicon plasma source isused to study the creation and sustainment of a high density plasma ofair constituents (N2, Ar and O2). Various antennaconfigurations including helical antennas are used in conjunction withwith a capacitive matchbox system and a broad-band (2-200 MHz) highpower (1 kW) amplifier to couple power to the plasma. A calibrated Birdmeter at the matchbox allows for real time monitoring and measurementsof forward and reflected power. The role of antenna configuration,applied magnetic field (100-1400 G) operating frequency and gasconcentrations of the power coupled to the high-density(1011-1013 cm-1) plasma have previouslybeen examined at lower gas pressure (10-100 mTorr) and these resultswill be extended to higher pressure regimes. Experiments at lowerpressures (10-100 mTorr) with a working gas of argon exhibit an intense4 cm diameter blue mode emission, indicative of the excitation of theArgon II state. This blue core emission will be further studied with theuse of photomultiplier tube and spectrometer
机译:仅提供摘要表格。射频螺旋等离子体源是 用于研究高密度等离子体的产生和维持 空气成分(N 2 ,Ar和O 2 )。各种天线 包括螺旋天线的配置与 具有电容式火柴盒系统和宽带(2-200 MHz)高 功率(1 kW)放大器将功率耦合到等离子体。校准鸟 火柴盒上的仪表可进行实时监控和测量 前进和反射的力量。天线配置的作用, 施加的磁场(100-1400 G)工作频率和气体 功率密度与高密度耦合 (10 11 -10 13 cm -1 )血浆以前 在较低的气压(10-100 mTorr)下进行了检查,这些结果 将扩展到更高的压力范围。较低的实验 氩气的工作压力(10-100 mTorr)表现出强烈的 直径为4厘米的蓝色模式发射,表明激发了 氩II状态。蓝芯的发射将与 使用光电倍增管和光谱仪

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号