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Preparation of Nd-Ba-Cu-O thin films by reactive coevaporation

机译:反应共蒸发制备Nd-Ba-Cu-O薄膜

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We have tried to prepared Nd123 superconducting thin films by an electron beam coevaporation technique. Only the adjustment of deposit conditions failed to get superconducting Nd123 films, so that we changed various kinds of cooling conditions such as a kind of oxidation gas during cooling, cooling process, cooling rate and gas pressure. Then we investigated the relation between the oxidation and the in-situ annealin temperature. As the result, the critical temperature (Tc) of Nd123 thin films remarkably increased.
机译:我们试图通过电子束共蒸发技术制备Nd123超导薄膜。仅调整沉积条件并不能获得超导Nd123膜,因此我们改变了各种冷却条件,例如冷却过程中的氧化气体,冷却过程,冷却速率和气压。然后,我们研究了氧化与原位退火温度之间的关系。结果,Nd123薄膜的临界温度(Tc)显着提高。

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