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首页> 外文期刊>International Journal of Photoenergy >Preparation and Characterization of Sb_(2)Te_(3) Thin Films by Coevaporation
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Preparation and Characterization of Sb_(2)Te_(3) Thin Films by Coevaporation

机译：共蒸发制备Sb_（2）Te_（3）薄膜及表征

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摘要

Deposition of Sb_(2)Te_(3) thin films on soda-lime glass substrates by coevaporation of Sb and Te is described in this paper. Sb_(2)Te_(3) thin films were characterized by x-ray diffraction (XRD), x-ray fluorescence (XRF), atomic force microscopy (AFM), x-ray photoelectron spectroscopy (XPS), electrical conductivity measurements, and Hall measurements. The abnormal electrical transport behavior occurred from in situ electrical conductivity measurements. The results indicate that as-grown Sb_(2)Te_(3) thin films are amorphous and undergo an amorphous-crystalline transition after annealing, and the posttreatment can effectively promote the formation of Sb-Te bond and prevent oxidation of thin film surface.
机译：本文介绍了通过Sb和Te的共蒸发在钠钙玻璃衬底上沉积Sb_（2）Te_（3）薄膜的方法。 Sb_（2）Te_（3）薄膜的特征在于X射线衍射（XRD），X射线荧光（XRF），原子力显微镜（AFM），X射线光电子能谱（XPS），电导率测量和霍尔测量。异常的电传输行为是由原位电导率测量产生的。结果表明，生长后的Sb_（2）Te_（3）薄膜为非晶态，退火后经历非晶态-晶态转变，后处理可有效促进Sb-Te键的形成并防止薄膜表面氧化。

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