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Preparation and Characterization ofSb2Te3Thin Films by Coevaporation

机译:共蒸发Sb2Te3薄膜的制备与表征

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Deposition ofSb2Te3thin films on soda-lime glass substrates by coevaporation of Sb and Te is described in this paper.Sb2Te3thin films were characterized by x-ray diffraction (XRD), x-ray fluorescence (XRF), atomic force microscopy (AFM), x-ray photoelectron spectroscopy (XPS), electrical conductivity measurements, and Hall measurements. The abnormal electrical transport behavior occurred fromin situelectrical conductivity measurements. The results indicate that as-grownSb2Te3thin films are amorphous and undergo an amorphous-crystalline transition after annealing, and the posttreatment can effectively promote the formation of Sb-Te bond and prevent oxidation of thin film surface.
机译:本文介绍了通过Sb和Te的共蒸发在钠钙玻璃衬底上沉积Sb2Te3薄膜的方法。射线光电子能谱(XPS),电导率测量和霍尔测量。从原位电导率测量中发现异常的电传输行为。结果表明,生长的Sb2Te3薄膜是非晶态的,退火后经历非晶态的结晶转变,后处理可以有效地促进Sb-Te键的形成并防止薄膜表面的氧化。

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