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Simultaneous Measurements of Thermal Optical and Linear Thermal Expansion Coefficients of Ta_2O_5 Films

机译:Ta_2O_5薄膜的热光学和线性热膨胀系数的同时测量

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An experimental determination technique for simultaneous measurements of the thermal optical and the linear thermal expansion coefficients of tantalum pentoxide thin films at infrared wavelength region is described, A tantalum pentoxide thin film deposited directly onto the end face of a single mode optical fiber was illuminated with a SLD source and its spectrum on reflection was monitored at various temperatures using an optical spectrum analyser. Temperature induced change in the index of refraction and the film thickness were determined from the spectrum to calculate the thermal optical and the linear thermal expansion coefficients simultaneously.
机译:描述了一种同时测定五氧化二钽薄膜在红外波长区域的热光学系数和线性热膨胀系数的实验测定技术,用单向光纤照射直接沉积在单模光纤端面上的五氧化二钽薄膜。使用光谱分析仪在各种温度下监控SLD源及其反射光谱。由光谱确定温度引起的折射率变化和膜厚度,以同时计算热光学系数和线性热膨胀系数。

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