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首页> 外文会议>European photovoltaic solar energy conference >LARGE-GRAINED POLYCRYSTALLINE SILICON THIN-FILM SOLAR CELLS ON GLASS
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LARGE-GRAINED POLYCRYSTALLINE SILICON THIN-FILM SOLAR CELLS ON GLASS

机译：玻璃上的大颗粒多晶硅硅薄膜太阳能电池

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Large-grained polycrystalline silicon (poly-Si) thin-film solar cells on glass were prepared using the‘seed layer concept’ which is based on the homo-epitaxial thickening of large-grained poly-Si seed layers. Seedlayers (p~+-type) were formed on glass by the aluminium-induced layer exchange (ALILE) process. Subsequentlyabsorber layers (p-type) were grown homo-epitaxially onto the seed layer at temperatures of about 600°C using highrateelectron-beam evaporation. Post-deposition treatments (defect annealing and defect passivation) were used toimprove the quality of the absorber layers. The pn-junctions were formed by the deposition of an n~+-type a-Si:Hemitter. Finally transparent conductive oxides (ZnO:Al) were deposited and solar cells were processed. The bestsolar cell obtained so far showed an active area efficiency of 2.7%. In addition to our standard process we studiedalso the implementation of advanced concepts, namely the seed layer formation on nano-textured glass and onZnO:Al coated glass.
机译：玻璃上的大晶粒多晶硅（poly-Si）薄膜太阳能电池的制备使用了。 “种子层概念”是基于大晶粒多晶硅籽晶层的同质外延加厚。种子 通过铝诱导层交换（ALILE）工艺在玻璃上形成多层（p〜+型）。随后 吸收层（p型）在大约600°C的温度下使用高速率均质外延生长到籽晶层上 电子束蒸发。沉积后处理（缺陷退火和缺陷钝化）用于 提高吸收层的质量。通过沉积n〜+型a-Si：H形成pn结 发射器。最后，沉积透明的导电氧化物（ZnO：Al），并对太阳能电池进行处理。最好的 迄今为止获得的太阳能电池的活性面积效率为2.7％。除了我们的标准流程，我们还研究了 还实施了先进的概念，即在纳米纹理玻璃上和 ZnO：Al涂层玻璃。

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