Investigation of reliability of MEMS gyroscopes under different shock conditions

机译：不同休克条件下MEMS陀螺仪可靠性研究

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In this work, the shock survivability of MEMS gyroscopes under different shock conditions are investigated. Both shock experiments and numerical simulations are carried out to study the influences of the shock load level, duration and damping conditions. The simulation results are consistent with the experimental results. The results indicate that the selections of natural frequencies and air-damping conditions are all critical to reach a desired shock resistances of the gyroscopes.

机译：在这项工作中，研究了MEMS陀螺仪在不同休克条件下的冲击活力。进行休克实验和数值模拟，以研究冲击载荷水平，持续时间和阻尼条件的影响。仿真结果与实验结果一致。结果表明，自然频率和空气阻尼条件的选择是至关重要的，以达到陀螺仪的所需冲击性。

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《IEEE International Conference on Nano/Micro Engineered and Molecular Systems》|2015年||共4页
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Pan Zhang; Chunhua He; Jimeng Zhang; Qiancheng Zhao; Zhenchuan Yang; Dacheng Zhang; Guizhen Yan;
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中图分类特种结构材料;
关键词
MEMS; damping; gyroscope; shock; simulation;

机译：MEMS;阻尼;陀螺;震动;模拟;

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1. Tactical grade MEMS vibrating ring gyroscope with high shock reliability [J] . Yoon Sungjin, Park Usung, Rhim Jaewook, Microelectronic Engineering . 2015,第JULa1期

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2. Shock Impact Reliability and Failure Analysis of a Three-Axis MEMS Gyroscope [J] . Journal of Microelectromechanical Systems . 2014,第2期

机译：三轴MEMS陀螺仪的冲击冲击可靠性和失效分析
3. MEMS Packaging Reliability in Board-Level Drop Tests Under Severe Shock and Impact Loading Conditions–Part I: Experiment [J] . Jingshi Meng, Stuart T. Douglas, Abhijit Dasgupta Components, Packaging and Manufacturing Technology, IEEE Transactions on . 2016,第11期

机译：在严重冲击和冲击载荷条件下的板级跌落测试中，MEMS包装的可靠性–第一部分：实验
4. Investigation of reliability of MEMS gyroscopes under different shock conditions [C] . Pan Zhang, Chunhua He, Jimeng Zhang, IEEE International Conference on Nano/Micro Engineered and Molecular Systems . 2015

机译：MEMS陀螺仪在不同冲击条件下的可靠性研究
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6. The Effect of Displacement Constraints on the Failure of MEMS Tuning Fork Gyroscopes under Shock Impact [O] . Jiangkai Lian, Jianhua Li, Lixin Xu 2019

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7. 2.2 - Coupling of MEMS gyroscope application with wavelet analysis for detection of airframe oscillations in flight conditions [O] . J. Bakunowicz, P. Rzucidlo 2016

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8. Reliability of COTS MEMS accelerometer under shock and thermomechanical cycling [R] . Teverovsky, A., Ghaffarian, R., Sutton, D. G., 2001

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Investigation of reliability of MEMS gyroscopes under different shock conditions

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