Investigation of reliability of MEMS gyroscopes under different shock conditions

机译：MEMS陀螺仪在不同冲击条件下的可靠性研究

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In this work, the shock survivability of MEMS gyroscopes under different shock conditions are investigated. Both shock experiments and numerical simulations are carried out to study the influences of the shock load level, duration and damping conditions. The simulation results are consistent with the experimental results. The results indicate that the selections of natural frequencies and air-damping conditions are all critical to reach a desired shock resistances of the gyroscopes.

机译：在这项工作中，研究了MEMS陀螺仪在不同冲击条件下的冲击生存能力。进行了冲击试验和数值模拟，以研究冲击载荷水平，持续时间和阻尼条件的影响。仿真结果与实验结果吻合。结果表明，固有频率和空气阻尼条件的选择对于达到所需的陀螺仪抗冲击性都是至关重要的。

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《IEEE International Conference on Nano/Micro Engineered and Molecular Systems》|2015年|441-444|共4页
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Pan Zhang; Chunhua He; Jimeng Zhang; Qiancheng Zhao; Zhenchuan Yang; Dacheng Zhang; Guizhen Yan;
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MEMS; damping; gyroscope; shock; simulation;

机译：MEMS;阻尼;陀螺仪;冲击;仿真;

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3. MEMS Packaging Reliability in Board-Level Drop Tests Under Severe Shock and Impact Loading Conditions–Part I: Experiment [J] . Jingshi Meng, Stuart T. Douglas, Abhijit Dasgupta Components, Packaging and Manufacturing Technology, IEEE Transactions on . 2016,第11期

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4. Investigation of reliability of MEMS gyroscopes under different shock conditions [C] . Pan Zhang, Chunhua He, Jimeng Zhang, IEEE International Conference on Nano/Micro Engineered and Molecular Systems . 2015

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Investigation of reliability of MEMS gyroscopes under different shock conditions

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