Modular MEMS Experimental Platform for Transmission Electron Microscopy

机译：用于透射电子显微镜的模块化MEMS实验平台

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We present a modular MEMS experimental platform compatible with transmission electron microscope (TEM) systems that includes 4 probes with positional control suitable to contact nanoscale objects, four-point electrical measurement capability, force sensing capabilities, and unprecedented mechanical stability for low vibration positioning. Ultra-sharp conductive tips are a critical feature enabling several applications, and two approaches have been successfully demonstrated to obtain tip radii below 50nm: the first approach involves microassembly and electrochemical etching of a tungsten probe on a MEMS positioner, and the second approach is in-situ ion milling of silicon tips with a focused ion beam (FIB) instrument. The electrochemical probe etching process is the first reported post-processing of a heterogeneous assembled microsystem.

机译：我们介绍了一种模块化MEMS实验平台，其兼容透射电子显微镜（TEM）系统，包括4个探头，该探针适于接触纳米级目录，四点电测量能力，力传感能力和前所未有的机械稳定性，用于低振动定位。超尖头导电提示是实现若干应用的关键特征，并且已经成功地证明了两种方法以获得低于50nm的尖端半径：第一种方法涉及在MEMS定位器上进行微型装配和钨探针的微型探针和电化学蚀刻。第二种方法是 - 具有聚焦离子束（FIB）仪器的硅尖端的硅铣削。电化学探针蚀刻工艺是第一报告的非均相组装微系统的后处理。

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《IEEE International Conference on Micro Electro Mechanical Systems》|2006年||共4页
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Sarkar N.; Baur C.; Stach E.; Jandric Z.; Stallcup R.; Ellis M.; Skidmore G.; Liu J.; Fedder G.K.;
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Modular MEMS Experimental Platform for Transmission Electron Microscopy

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