Through silicon via process characterization by integrated inspection/metrology solutions in visible and infrared domain

机译：通过可见光和红外领域的集成检测/计量学解决方案，通过硅通孔工艺表征

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In this paper, we present an integrated in-line solution, combining automatic visual inspection/classification with unique 2D/3D measurement technologies, which was used to characterize the defectivity and the morphology of open through silicon via (TSV) structures. The measurements were performed on 300mm Si wafers hosting several populations of via with diameter varied from 5 to 20 micron, and target aspect ratio from 1:8 to 1:20. Interferometry techniques coupled with high resolution cameras working in white light and infrared domains were used to demonstrate TSV process control in R&D and high volume manufacturing environments.

机译：在本文中，我们提出了一种集成的在线解决方案，将自动视觉检查/分类与独特的2D / 3D测量技术相结合，用于表征开口硅通孔（TSV）结构的缺陷性和形态。测量是在300mm Si晶圆上进行的，该晶圆上装有多个通孔，直径从5到20微米不等，目标纵横比从1：8到1:20。干涉测量技术与在白光和红外域中工作的高分辨率相机相结合，被用于演示R＆D和大批量制造环境中的TSV工艺控制。

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《Annual SEMI Advanced Semiconductor Manufacturing Conference》|2015年|90-95|共6页
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Devanciard Nicolas; Rey Stephane; Magis Thomas; Minoret Stephane; Beitia Carlos; Alliata Dario; Marx David; Bachiraju Prasad; Hart Darcy; Thornell John; Dudley Russ;
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1. Quality wins - Metrology-based technology becomes ever more capable, and ever more integrated with the production process, from design right through to final inspection [J] . Mike Excell Metalworking Production . 2004,第9期

机译：质量制胜-基于计量的技术变得越来越强大，并且与生产过程（从设计到最终检验）的集成度越来越高
2. Raman, mid-infrared, near-infrared and ultraviolet-visible spectroscopy of PDMS silicone rubber for characterization of polymer optical waveguide materials [J] . Cai D., Neyer A., Kuckuk R., Journal of Molecular Structure . 2010,第1a3期

机译：PDMS硅橡胶的拉曼光谱，中红外光谱，近红外光谱和紫外可见光谱，用于表征聚合物光波导材料
3. High-quality integrated microdisk resonators in the visible-to-near-infrared wavelength range on a 3C-silicon carbide-on-insulator platform [J] . Optics Letters . 2020,第1期

机译：高质量集成微仪谐振器在3C - 碳化碳化碳化灯平台上的可见到近红外波长范围内
4. Through silicon via process characterization by integrated inspection/metrology solutions in visible and infrared domain [C] . Devanciard Nicolas, Rey Stephane, Magis Thomas, Annual SEMI Advanced Semiconductor Manufacturing Conference . 2015

机译：通过在可见光和红外域中的集成检查/计量溶液通过过程表征通过硅。
5. Silicon Integrated Circuits and Systems for Frequency Domain Near Infrared Spectroscopy. [D] . Sthalekar, Chirag C. 2015

机译：用于频域近红外光谱的硅集成电路和系统。
6. Photomethanation of Gaseous CO2 over Ru/Silicon Nanowire Catalysts with Visible and Near‐Infrared Photons [O] . Paul G. OBrien, Amit Sandhel, Thomas E. Wood, 2014

机译：可见光和近红外光子在Ru /硅纳米线催化剂上气态CO2的光甲烷化
7. Fabrication and characterization of silicone-based tissue phantoms with tunable optical properties in the visible and near infrared domain [O] . Frederick Ayers, Alex Grant, Danny Kuo, 2008

机译：可见光和近红外域中可调谐光学性能的硅氧烷基组织幽灵的制造与表征

Through silicon via process characterization by integrated inspection/metrology solutions in visible and infrared domain

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