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首页> 外文会议>Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics >Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization
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Metallo-dielectric nanophotonic materials via direct laser writing and electroless metallization

机译：通过直接激光写入和无电金属化金属介质纳米光学材料

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Interest in three-dimensional (3D) metallo-dielectric photonic crystals (MDPCs) has grown considerably given their potential applications in optics and photonics. MDPCs can exhibit intriguing and potentially useful optical properties, including ultra-wide photonic bandgaps, engineered thermal emission, and negative refractive index. Yet experimental studies of such materials remain few because of the difficulties associated with fabricating 3D micron- and sub-micron-scale metallic structures. We report a route to MDPCs based on metallization of a 3D polymeric photonic crystal (PC) fabricated by multi-photon microfabrication (MPM). Polymeric PCs having face-centered tetragonal symmetry and micrometer-scale periodicity were created using a cross-linkable acrylate or epoxide pre-polymer. The resulting PCs were metallized by electroless deposition of silver or copper. Analysis of the metallized structures in cross-section by scanning electron microscopy (SEM) and energy dispersive X-ray spectroscopy shows that silver deposited conformally onto the entire micro-porous lattice. The dielectric and metallized PCs were characterized by Fourier transform infrared (FTIR) spectroscopy. The polymer photonic crystals exhibit a stop band with strong reflectance near 4 to 6 microns, depending upon the lattice period. In contrast, FTIR spectra of the metallized PCs show widened stop bands of nearly 6 microns and greater and maximum reflectance exceeding 90%. The appreciable broadening of the stop band due to the presence of the deposited metal is a result consistent with previously reported theoretical and experimental data for all-metallic 3D PCs. Thus, the approach reported here appears suitable for fabricating 3D MDPCs of many symmetries and basis sets and provides a path for integrating such structures with other micron-scale optical elements.
机译：在光学和光子学中的潜在应用，对三维（3D）金属电介质光子晶体（MDPC）的兴趣已经显着生长。 MDPC可以表现出有趣和潜在的有用的光学性质，包括超宽光子带隙，工程热发射和负折射率。由于与制造3D微米和亚微米级金属结构相关的困难，因此对这些材料的实验研究仍然很少。我们以多光子微制造（MPM）制造的3D聚合物光子晶体（PC）的金属化报告给MDPC的路线。使用可交联丙烯酸酯或环氧化物预聚物产生具有面向中心的四方对称和微米级周期性的聚合物PC。通过无电沉积银或铜金属化的得到的PC。通过扫描电子显微镜（SEM）和能量分散X射线光谱分析横截面中的金属化结构表明，银沉积在整个微孔晶格上。通过傅里叶变换红外（FTIR）光谱，其特征在于介电和金属化PC。根据晶格时段，聚合物光子晶体表现出具有近4至6微米的强反射率的止动带。相比之下，金属化PC的FTIR光谱显示出近6微米的加宽停止带，更大，最大反射率超过90％。由于沉积的金属存在而导致的止动杆的可观扩展是与先前报告的全金属3D PC的理论和实验数据一致的结果。因此，这里报道的方法似乎适用于制造许多对称性的3D MDPC和基础组，并提供用于将这种结构与其他微级光学元件集成的路径。

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