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首页> 外文会议>Conference on Photomask and Next-Generation Lithography Mask Technology >Fast Yield-Driven Fracture for Variable Shaped-Beam Mask Writing
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Fast Yield-Driven Fracture for Variable Shaped-Beam Mask Writing

机译：可变成型梁掩模写入的快速产量驱动骨折

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Increasing transistor densities, smaller feature sizes, and the aggressive use of RET techniques with each successive process generation have collectively presented new challenges for current fracture tools, which are at the heart of layout data preparation. One main challenge is to reduce the number of small dimension trapezoids (slivers) to improve mask yield since the sliver count reflects the risk of mask critical-dimension errors. Some commercial tools are available for handling the sliver minimization problem in fracture, such as CATS from Synopsys and Fracturem from Mentor Graphics. However, the number of slivers in the existing fracture solutions can be significantly reduced. The integer linear programming (ILP) method has been previously applied to find the optimal fracture but has not explored potential benefits from additional ray-segments. Unfortunately, the ILP becomes prohibitively slow for polygons with the large number of vertices and heuristic partitioning of large polygons may severely degrade the solution quality. In this paper, we propose a new ray-segment selection heuristic which can find a near-optimal fracture solution in practical time while being flexible enough to take into account all specified requirements. We fist divide the rectilinear region with all rays from the concave points and formulate the fracture problem as a sequential ray-segment selection problem. Each ray segment is assigned a weight based on its probability to form a sliver. All ray segments to be selected are placed in a candidate pool. An iterative "gain" based process is used for fast and efficient selecting ray segments from the candidate pool and dynamic update of ray segments and their gains. Further reduction of the number of slivers is achieved by auxiliary ray-segments. The resulted runtime overhead is reduced by a rule-based auxiliary ray-segments addition method which achieves a tradeoff between the sliver number reduction and runtime overhead. Compared with state-of-art sliver-driven fracturing tools, the proposed method reduces the number of slivers in the fractures of two industry testcases by 76.7% and 58.6%, respectively, without inflating the runtime and shot count. Similarly, compared with the previous ILP based fracture methods, the new method reduces the number of slivers by 56.1% and 2.2%, respectively, with more than 60X speedup and insignificant shot count overhead. The reduction in the sliver number is primarily due to the introduction of additional ray-segments. The proposed method can also solve the reverse-tone fracture problem in practical time for large industry testcases.
机译：增加晶体管密度，较小的特征尺寸以及每个连续的过程产生的RET技术的侵略性使用已经集体呈现了当前裂缝工具的新挑战，这是在布局数据准备的核心。一个主要挑战是减少小尺寸梯形（条）的数量，以改善掩模产量，因为Sliver Count反映了掩模临界维度误差的风险。一些商业工具可用于处理骨折中的裂隙最小化问题，例如来自导师图形的Synopsys和Fracturem的猫。然而，可以显着降低现有骨折解决方案中的裂隙数。以前已经应用整数线性编程（ILP）方法以找到最佳骨折，但没有探索来自额外的射线段的潜在好处。遗憾的是，ILP对于具有大量顶点的多边形来说，ILP对多边形的启发式分配可能严重降低解决方案质量。在本文中，我们提出了一种新的射线段选择启发式，可以在实际时间内找到近乎最佳的断裂解决方案，同时足够灵活地考虑所有指定的要求。我们拳头将直线区域与凹点的所有光线分开，并将断裂问题作为顺序射线段选择问题。基于其形成条子的概率分配每个光线段。要选择的所有光线段都放在候选池中。基于迭代的“增益”的过程用于从候选池中的快速和有效的选择射线段，以及射线段的动态更新及其收益。通过辅助射线段实现释放射线数量的进一步减小。由基于规则的辅助射线段减少了产生的运行时开销，该辅助射线段加法方法，该方法在减少条子数和运行时开销之间实现了交易。与最先进的条形的裂缝断裂工具相比，该方法分别将两种行业试验酶的骨折的裂缝数分别减少76.7％和58.6％，而不会膨胀运行时和射击计数。同样，与先前的基于ILP的骨折方法相比，新方法分别将散射数减少56.1％和2.2％，超过60倍的加速和微不足道的射击计数。 Sliver号的减少主要是由于引入额外的射线段。该方法还可以在实用时间内解决大型行业试验酶的逆音骨折问题。

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