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首页> 外文会议>Photomask and Next-Generation Lithography Mask Technology XIII pt.2 >Fast Yield-Driven Fracture for Variable Shaped-Beam Mask Writing
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Fast Yield-Driven Fracture for Variable Shaped-Beam Mask Writing

机译：快速屈服驱动断裂，用于可变形束掩模的书写

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Increasing transistor densities, smaller feature sizes, and the aggressive use of RET techniques with each successive process generation have collectively presented new challenges for current fracture tools, which are at the heart of layout data preparation. One main challenge is to reduce the number of small dimension trapezoids (slivers) to improve mask yield since the sliver count reflects the risk of mask critical-dimension errors. Some commercial tools are available for handling the sliver minimization problem in fracture, such as CATS from Synopsys and Fracturem from Mentor Graphics. However, the number of slivers in the existing fracture solutions can be significantly reduced. The integer linear programming (ILP) method has been previously applied to find the optimal fracture but has not explored potential benefits from additional ray-segments. Unfortunately, the ILP becomes prohibitively slow for polygons with the large number of vertices and heuristic partitioning of large polygons may severely degrade the solution quality. In this paper, we propose a new ray-segment selection heuristic which can find a near-optimal fracture solution in practical time while being flexible enough to take into account all specified requirements. We fist divide the rectilinear region with all rays from the concave points and formulate the fracture problem as a sequential ray-segment selection problem. Each ray segment is assigned a weight based on its probability to form a sliver. All ray segments to be selected are placed in a candidate pool. An iterative "gain" based process is used for fast and efficient selecting ray segments from the candidate pool and dynamic update of ray segments and their gains. Further reduction of the number of slivers is achieved by auxiliary ray-segments. The resulted runtime overhead is reduced by a rule-based auxiliary ray-segments addition method which achieves a tradeoff between the sliver number reduction and runtime overhead. Compared with state-of-art sliver-driven fracturing tools, the proposed method reduces the number of slivers in the fractures of two industry testcases by 76.7% and 58.6%, respectively, without inflating the runtime and shot count. Similarly, compared with the previous ILP based fracture methods, the new method reduces the number of slivers by 56.1% and 2.2%, respectively, with more than 60X speedup and insignificant shot count overhead. The reduction in the sliver number is primarily due to the introduction of additional ray-segments. The proposed method can also solve the reverse-tone fracture problem in practical time for large industry testcases.
机译：晶体管密度的提高，特征尺寸的减小以及在每个后续工艺过程中积极使用RET技术，共同为当前的断裂工具提出了新的挑战，而这正是布局数据准备工作的核心。一个主要的挑战是减少小尺寸梯形（条子）的数量以提高面罩的产量，因为条子数反映了面罩临界尺寸误差的风险。一些商业工具可用于处理断裂中的条子最小化问题，例如Synopsys的CATS和Mentor Graphics的Fracturem。但是，现有裂缝解决方案中的条子数量可以大大减少。整数线性规划（ILP）方法先前已应用于发现最佳裂缝，但尚未探讨其他射线段的潜在优势。不幸的是，对于具有大量顶点的多边形，ILP变得异常缓慢，并且大多边形的启发式划分可能会严重降低求解质量。在本文中，我们提出了一种新的射线段选择启发式方法，该方法可以在实际时间内找到接近最佳的裂缝解决方案，同时具有足够的灵活性以考虑所有指定要求。我们首先将直线区域与所有来自凹点的光线分开，然后将断裂问题公式化为顺序的射线段选择问题。根据每个射线段形成一条条的概率分配一个权重。所有要选择的射线段都放置在候选池中。基于迭代“增益”的过程用于从候选池中快速有效地选择射线段，并动态更新射线段及其增益。辅助射线段可进一步减少条子数量。通过基于规则的辅助射线段添加方法减少了生成的运行时开销，该方法实现了条数减少与运行时开销之间的折衷。与最新的条子驱动压裂工具相比，该方法可将两个行业测试用例的裂缝中的条子数量分别减少76.7％和58.6％，而不会增加运行时间和注射数量。同样，与以前的基于ILP的断裂方法相比，新方法分别减少了56.1％和2.2％的条子数量，加速比提高了60倍以上，而射弹计数开销却微不足道。棉条数量的减少主要是由于引入了其他射线段。对于大型工业用例，该方法还可以在实际时间内解决反调断裂问题。

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