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首页> 外文会议>ASME international design engineering technical conferences;DETC2009;Computers and information in engineering conference;CIE2009 >VIRTUAL EQUIPMENT ENGINEERING: A NOVEL APPROACH FOR THE INTEGRATED DEVELOPMENT OF SEMICONDUCTOR MANUFACTURING EQUIPMENT
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VIRTUAL EQUIPMENT ENGINEERING: A NOVEL APPROACH FOR THE INTEGRATED DEVELOPMENT OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

机译：虚拟设备工程：半导体制造设备集成开发的新方法

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摘要

An innovative approach for the integrated and virtual development of new semiconductor manufacturing equipment is presented in this paper: Virtual Equipment Engineering (VEE). This new concept allows for the intelligent coupling of CAD with existing and novel simulation methods of the equipment development process towards a flexibly configurable integrated system. The main objective of VEE is to forecast the influence of development measures on the process and on the final device characteristics in the very early development stages of new equipment. Therefore, VEE follows a holistic view on equipment and processes to offer an integrated and adaptable development environment and a consistent simulation of equipment, process, process chain, and final devices. The major challenge in realizing this approach is the provision of a continuous, consistent, and persistent simulation chain. One possible solution dealing with this challenge is being developed and presented in this paper.
机译：本文介绍了一种用于新型半导体制造设备的集成和虚拟开发的创新方法：虚拟设备工程（VEE）。这个新概念允许CAD与设备开发过程中现有的和新颖的仿真方法进行智能耦合，从而形成一个可灵活配置的集成系统。 VEE的主要目标是在新设备的早期开发阶段预测开发措施对过程和最终设备特性的影响。因此，VEE遵循对设备和过程的整体看法，以提供集成且适应性强的开发环境以及对设备，过程，过程链和最终设备的一致仿真。实现这种方法的主要挑战是提供连续，一致和持久的仿真链。本文正在开发并提出一种应对这一挑战的可能解决方案。

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