Epitaxial liftoff of GaAs detectors onto silicon integrated circuits

机译：GaAs探测器的外延升降机到硅集成电路上

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The seperation of thin film epitaxial devices from the growth substrated is called epitaxial lift off, and the subsequent transfer and bonding of these thin film devices to smooth substrates such as Si integrated circuits is studied.

机译：从生长基质的薄膜外延装置的分离称为外延升降机，并研究了这些薄膜装置的随后转移和粘合到诸如Si集成电路的平滑基板。

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《IEEE Lasers and Electro-Optics Society Annual Meeting》|1993年||共2页
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Jokerst N.M.; Institute of Electric and Electronic Engineer;
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中图分类自动化技术、计算机技术;
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1. Vapor phase epitaxial liftoff of GaAs and silicon single crystal films [J] . Chang W., Pike G.A., Slone J.A., Solar Energy Materials and Solar Cells: An International Journal Devoted to Photovoltaic, Photothermal, and Photochemical Solar Energy Conversion . 1999,第2期

机译：GaAs和硅单晶膜的气相外延剥离
2. High-Quality 150 mm InP-to-Silicon Epitaxial Transfer for Silicon Photonic Integrated Circuits [J] . D. Liang, J. E. Bowers, D. C. Oakley, Electrochemical and solid-state letters . 2009,第4期

机译：用于硅光子集成电路的高质量150 mm InP到硅外延转移
3. Epitaxial lift-off GaAs LEDs to Si for fabrication of opto-electronic integrated circuits [J] . Pollentier I., Demeester P. Electronics Letters . 1990,第3期

机译：外延剥离砷化镓发光二极管至硅，用于制造光电集成电路
4. Epitaxial liftoff of GaAs detectors onto silicon integrated circuits [C] . Jokerst, N.M. . 1993

机译：GaAs检测器的外延剥离到硅集成电路上
5. GaAs-Based Components for Photonic Integrated Circuits =GaAs-basierte Komponenten für photonische integrierte Schaltungen [D] . Arar, Bassem. 2019

机译：用于光子集成电路的GaAs基组件=光子集成电路的基于GaAS的组件
6. Low temperature plasma enhanced CVD epitaxial growth of silicon on GaAs: a new paradigm for III-V/Si integration [O] . Romain Cariou, Wanghua Chen, Jean-Luc Maurice, -1

机译：GaAs上的低温等离子体增强了CVD的硅外延生长：III-V / Si集成的新范例
7. THIN FILM GaAs SOLAR CELLS ON GLASS SUBSTRATES BY EPITAXIAL LIFTOFF [O] . X. Y. Lee, Ashish K. Verma, Charles Q. Wu, 2016

机译：外壳LIFTOFF上的薄膜Gaas太阳能电池在玻璃基板上
8. Proposal to Develop Resonant-Tunneling Diode Circuits Using Epitaxial Liftoff [R] . Brar, B. 1999

机译：关于利用外延剥离开发谐振隧穿二极管电路的建议

Epitaxial liftoff of GaAs detectors onto silicon integrated circuits

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