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首页> 外文会议>International Conference on Solid-State and Integrated Circuit Technology >Phase correction in digital self-oscillation drive circuit for improve silicon MEMS gyroscope bias stability
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Phase correction in digital self-oscillation drive circuit for improve silicon MEMS gyroscope bias stability

机译：用于改善硅MEMS陀螺仪偏置稳定性的数字自振荡驱动电路中的相位校正

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摘要

To further improve the performance of the bias stability which is the key character for MEMS gyroscope in navigation application, a new digital self-oscillation based drive circuit with drive phase correction is proposed. Started with the gyroscope working principle, analyzed the factors that may affect the bias output. Compared with drive amplitude control which already got a higher precision, the drive phase drift has become the main factor affects the bias stability. Consider the linear phase response character of the digital signal processing this paper gives out a linear phase compensation method to reduce the phase drift. Experiment results indicate that the bias stability has improved from 56°/h to 24°/h.
机译：为了进一步提高偏置稳定性的性能，该稳定性是导航应用中MEMS陀螺仪的关键特征，提出了一种具有驱动相位校正的新型数字自振荡的驱动电路。从陀螺仪工作原理开始，分析了可能影响偏置输出的因素。与已经获得更高精度的驱动幅度控制相比，驱动相位漂移已成为主要因素影响偏置稳定性。考虑数字信号处理的线性相位响应特性本文提供了线性相位补偿方法以减少相位漂移。实验结果表明，偏置稳定性从56°/ h改善到24°/ h。

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