Investigation of thermophoretic protection with speed-controlled particles at 100 mTorr, 50 mTorr, and 25 mTorr - (PPT)

机译：100 mtorr，50 mtorr和25 mtorr - （PPT）的速度控制颗粒对蒸汽保护的研究

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Particle contamination control is crucial for protecting Extreme Ultraviolet Lithography (EUVL) masks in manufacturing tools. Due to the small feature sizes, particles with diameters down to 30 nm can deteriorate the mask performance. Therefore control schemes are required to protect the mask from particle deposition during applications in EUVL exposure tools at reduced pressure. A non-contact method for protection of EUVL mask, like thermophorcsis, is most desirable.

机译：粒子污染控制对于保护制造工具中的极端紫外线（EUVL）面罩是至关重要的。由于小特征尺寸，直径至30nm直径的颗粒可以恶化掩模性能。因此，在EUVL曝光工具在减压下，需要控制方案以保护掩模免受粒子沉积免受粒子沉积。用于保护Euvl面膜的非接触方法，如热托洛斯，是最理想的。

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《International Extreme Ultra-Violet Lithography Symposium》|2005年||共1页
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Jung Hyeun Kim; Christof Asbach; Se-Jin Yook; David Y. H. Pui; Heinz Fissan; Kevin J. Orvek; Arun Ramamoorthy;
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1. Investigation of thermophoretic protection with speed-controlled particles at 100, 50, and 25 mTorr [J] . Kim JH, Fissan H, Asbach C, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2006,第3期

机译：使用100、50和25 mTorr的速度可控制的粒子进行热泳保护的研究
2. Operating modes of a magnetized cold cathode plasma in helium 50-6400 mTorr [J] . Sommerer Timothy J., Aceto Steven C., Trotter Jason F., Journal of Physics, D. Applied Physics: A Europhysics Journal . 2019,第43期

机译：氦50-6400 mtorr中的磁化冷阴极等离子体的操作模式
3. Structure of the Clean and Oxygen-Covered Cu(100) Surface at Room Temperature in the Presence of Methanol Vapor in the 10–200 mTorr Pressure Range [J] . Baran Eren, Heath Kersell, Robert S. Weatherup, The journal of physical chemistry, B. Condensed matter, materials, surfaces, interfaces & biophysical . 2018,第2期

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4. Investigation of thermophoretic protection with speed-controlled particles at 100 mTorr, 50 mTorr, and 25 mTorr - (PPT) [C] . Jung Hyeun Kim, Christof Asbach, Se-Jin Yook, International Extreme Ultra-Violet Lithography Symposium . 2005

机译：100 mtorr，50 mtorr和25 mtorr - （PPT）的速度控制颗粒对蒸汽保护的研究
5. An experimental investigation of a two-dimensional Scramjet inlet at flow Mach numbers of 8 to 25 and stagnation temperatures of 800 to 4,100 K. [D] . Sala Minucci, Marco Antonio. 1991

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Investigation of thermophoretic protection with speed-controlled particles at 100 mTorr, 50 mTorr, and 25 mTorr - (PPT)

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