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首页> 外文会议>Annual Conference of the Chinese Society of Micro-Nano Technology >Rapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass Substrate
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Rapid Microfluidc Biochips Fabrication by Femtosecond Laser on Glass Substrate

机译：快速Microfluidc Biochips通过飞秒激光在玻璃基板上制造

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This paper uses a femtosecond laser scriber to perform the direct-writing ablation of glass substrate for the development of microfluidic biochips. The surface quality of the ablated microchannels was examined by scanning electron microscopy (SEM) and atomic force microscopy (AFM) measurement techniques. The developed femtosecond laser ablation system provides a versatile and economic approach for the fabrication of glass-base microfluidic chips. In the laser writing process, the desired microfluidic patterns are designed using commercial computer software and are then transferred to the laser scriber to ablate the trenches. The results show that a very smooth channel wall can be achieved through the annealing process at the temperature 650°C and 5 hours. The system provides an economic and powerful means of rapid glass microfluidic biochips development.
机译：本文采用飞秒激光划线芯进行用于开发微流体生物芯片的玻璃基板的直接写入消融。通过扫描电子显微镜（SEM）和原子力显微镜（AFM）测量技术来检查烧蚀微通道的表面质量。开发的飞秒激光消融系统为制造玻璃基础微流体芯片提供了一种多功能和经济的方法。在激光写入过程中，使用商业计算机软件设计所需的微流体图案，然后将其转移到激光划线上以消除沟槽。结果表明，通过在650℃和5小时的温度下的退火过程可以实现非常平滑的通道壁。该系统提供了一种快速玻璃微流体生物芯片发育的经济和强大手段。

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