The paper reports on the generation of wide-aperture boron ion beams with a duration of 250 μm, pulse repetition frequency of 10 Hz, and total beam current of up to 0.5 A at an extraction voltage of up to 60 kV in a vacuum arc ion source with lanthanum hexaboride and boron carbide cathodes. The percentage of boron ions in a beam depended on the atomic fraction of boron in the cathode materials and was 86 % for lanthanum hexaboride and 80 % for boron carbide.
展开▼
