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首页> 外文会议>Conference on Ph.D Research in Microelectronics and Electronics >A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range
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A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range

机译：ALN超声换能器使用多用户压电机工艺制造的可行性研究GHz范围的指纹扫描

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摘要

In this study, the feasibility of a piezoelectrical micromachined ultrasonic fingerprint sensor working at GHz range at CMOS-compatible voltage using the PiezoMUMPs process capabilities is explored analytically and through Finite Element Analysis. In addition to the advantages offered by ultrasonic fingerprint sensors based on MEMS technology, the all solid approach used here requires much lower driving voltage and provides higher operative frequency for improved axial resolution, overcoming some of the current limitations present in micromachined ultrasonic transducers. In this work we deal with the restrictions in the PiezoMUMPs process that arise due to the use of standard design rules that place constraints on the thicknesses, and materials that may be used, however, these inconveniences may be partially overcome by taking proper design considerations. Here we obtain output voltage in the mV range for an applied short pulse of 2 Vp at 1.6 GHz, showing the possibility to fabricate these piezoelectric micromachined ultrasonic transducers without requiring a customized process.
机译：在这项研究中，通过有限元分析探索了使用压电泵处理能力在CMOS兼容电压下工作的压电微机械超声指纹传感器的可行性。除了基于MEMS技术的超声指纹传感器提供的优点之外，这里所使用的所有固体方法还需要更低的驱动电压，并且为改善的轴向分辨率提供更高的操作频率，克服了微机械超声换能器中存在的一些当前限制。在这项工作中，我们处理压电泵的限制，这是由于使用标准设计规则而产生的，这些规则将限制在厚度和可以使用的材料上，可以通过采取适当的设计考虑来部分地克服这些不便。在这里，我们在1.6 GHz的施加的短脉冲中获得MV范围内的输出电压，显示了在不需要定制的过程的情况下制造这些压电微机械超声换能器的可能性。

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