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首页> 外文期刊>Sensors and Actuators, A. Physical >A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process
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A feasibility study of piezoelectric micromachined ultrasonic transducers fabrication using a multi-user MEMS process

机译：使用多用户MEMS工艺制造压电微机械超声换能器的可行性研究

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We study the feasibility of fabricating piezoelectric micromachined ultrasonic transducers (PMUTs) using a commercially available multi-user MEMS process (MUMPs). MUMPs provide a low cost and easily accessible option for MEMS researchers, but the resulting device performance is usually sacrificed. In this work, we investigate the potential limitations of MUMPs PMUTs using an experimental approach. The square-shaped PMUT structure that we fabricated has a dimension of 500 mu m by 500 mu m. It consists mainly of a 10 mu m silicon layer and a 0.5 mu m aluminum nitride piezoelectric layer. Vibrometer measurements revealed that the PMUTs resonate at 600 kHz in air. Acoustic experiments showed a resonance frequency of 1.2 MHz in immersion, which was caused by a higher order vibration mode. Transmit and receive experiments using a hydrophone and an off-the-shelf transducer demonstrated the functionality of PMUTs in immersion, with measured transmit and receive sensitivity at 0.95 kPa/V and 1.35 mu V/Pa, respectively, for a 1.8 mm by 1.8 mm element. Limitations of the multi-user process that restrict the operating frequency and output pressure are discussed. More specifically, the maximum fundamental modal frequency is limited to about 2 MHz in immersion by the process design rule, and the maximum output pressure is restricted by a maximum driving voltage of 25V(pp) because of potential dielectric breakdown of the piezoelectirc layer. Acoustic experiments also showed ringing that affects the axial resolution of the devices. The ringing limits the usefulness of the devices in pulse-echo applications. We conclude that MUMPs PMUTs are more suitable for applications that rely mainly on the device receive performance. (C) 2016 Elsevier B.V. All rights reserved.
机译：我们研究了使用市售的多用户MEMS工艺（MUMP）制造压电微机械超声换能器（PMUT）的可行性。 MUMP为MEMS研究人员提供了一种低成本且易于访问的选择，但通常会牺牲由此产生的器件性能。在这项工作中，我们使用实验方法调查MUMP PMUTs的潜在局限性。我们制造的方形PMUT结构的尺寸为500微米乘500微米。它主要由10微米的硅层和0.5微米的氮化铝压电层组成。振动计测量显示，PMUT在空气中以600 kHz共振。声学实验表明，浸入时的共振频率为1.2 MHz，这是由更高阶的振动模式引起的。使用水听器和现成的换能器进行发射和接收实验，证明了浸入式PMUT的功能，对于1.8 mm x 1.8 mm的发射和接收灵敏度分别为0.95 kPa / V和1.35 mu V / Pa。元件。讨论了限制操作频率和输出压力的多用户过程的局限性。更具体地，根据工艺设计规则，最大基本模态频率在浸入中被限制为大约2 MHz，并且由于压电层的潜在电介质击穿，最大输出压力受到25V（pp）的最大驱动电压的限制。声学实验还表明，振铃会影响设备的轴向分辨率。振铃限制了设备在脉冲回波应用中的用途。我们得出的结论是，MUMP PMUT更适合主要依赖设备接收性能的应用。 （C）2016 Elsevier B.V.保留所有权利。

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