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首页> 外文会议>2019 15th Conference on Ph.D Research in Microelectronics and Electronics >A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range
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A feasibility study of AlN ultrasonic transducers fabrication using the multi-user PiezoMUMPs process for fingerprint scanning at GHz range

机译：使用多用户PiezoMUMPs工艺制造AlN超声换能器以进行GHz范围的指纹扫描的可行性研究

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摘要

In this study, the feasibility of a piezoelectrical micromachined ultrasonic fingerprint sensor working at GHz range at CMOS-compatible voltage using the PiezoMUMPs process capabilities is explored analytically and through Finite Element Analysis. In addition to the advantages offered by ultrasonic fingerprint sensors based on MEMS technology, the all solid approach used here requires much lower driving voltage and provides higher operative frequency for improved axial resolution, overcoming some of the current limitations present in micromachined ultrasonic transducers. In this work we deal with the restrictions in the PiezoMUMPs process that arise due to the use of standard design rules that place constraints on the thicknesses, and materials that may be used, however, these inconveniences may be partially overcome by taking proper design considerations. Here we obtain output voltage in the mV range for an applied short pulse of 2 Vp at 1.6 GHz, showing the possibility to fabricate these piezoelectric micromachined ultrasonic transducers without requiring a customized process.
机译：在这项研究中，通过PiezoMUMPs处理能力，通过有限元分析，探索了压电微机械超声指纹传感器在CMOS兼容电压下工作于GHz范围的可行性。除了基于MEMS技术的超声指纹传感器提供的优势外，这里使用的全固态方法还需要更低的驱动电压并提供更高的工作频率以改善轴向分辨率，从而克服了微机械超声换能器中存在的一些电流限制。在这项工作中，我们解决了PieMUMUMPs工艺中的限制，这些限制是由于使用了对厚度和可以使用的材料施加限制的标准设计规则而引起的，但是，通过适当的设计考虑，可以部分克服这些不便之处。在这里，对于1.6 GHz的2 Vp施加的短脉冲，我们获得了mV范围内的输出电压，这表明无需定制工艺即可制造这些压电微机械超声换能器的可能性。

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