EUV emission properties of a laser-produced-lithium plasma

机译：激光制造锂等离子体的EUV排放性能

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Extreme ultraviolet (EUV) line emission at 13.5 nm was observed from a laser-produced plasma by use of a regenerative Li-based aqueous solution target. It was shown that utilization of dual nano-second laser pulses enhanced the in-band EUV conversion efficiency (CE) at 13.5 nm in 2π sr by three times its value for a single laser pulse. In the case of dual sub-picosecond laser pulses, EUV CE was also increased by a factor of three.

机译：通过使用再生锂基水溶液靶点，从激光产生的等离子体观察到极端紫外（EUV）线发射。结果表明，双纳秒激光脉冲的利用在单个激光脉冲的值中以13.5nm以13.5nm的13.5nm提高了带内EUV转换效率（CE）。在双磷秒的激光脉冲的情况下，EUV CE也增加了三倍。

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《International Quantum Electronics Conference》|2005年||共2页
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Takeshi Higashiguchi; Chirag Rajyaguru; Keita Kawasaki; Masaya Hamada; Naoto Dojyo; Wataru Sasaki; Shoichi Kubodera;
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EUV emission properties of a laser-produced-lithium plasma

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