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A mathematical model for the growth of aluminum etch tunnels

机译:铝蚀刻隧道生长的数学模型

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A simulation of the growth of pits on aluminum during anodic etching in hot chloride solutions was developed, based on equations for mass transport and for the potential-controlled removal of chloride ions from the dissolving surface. The latter process initiates oxide passivation. Etch pits transform into tunnels which at first maintain parallel sidewalls and then begin to taper. The predicted shapes agree closely with those measured experimentally. Tunnel formation is possible only when the potential during etching is within 20-30 mV of the repassivation potential, so that the dissolving area nearly constant during pit growth. In the tapered-width regime of tunnel growth, the AlCl_3 concentration at the end of the tunnel is near saturation, despite the absence of precipitation from the model equations. The model shows that this condition derives from the low conductivity of the concentrated solution, coupled with the sensitivity of passivation to the potential.
机译:基于大规模运输方程,开发了在热氯化物溶液中阳极蚀刻过程中铝型凹坑的生长的模拟,并用于溶解表面的氯离子的电氯离子的潜在控制。后一种方法启动氧化物钝化。蚀刻坑转换成隧道,首先保持平行侧壁,然后开始逐渐变细。预测的形状与实验衡量的人完全同意。仅当蚀刻期间的电位在20-30 mV的回归势时,隧道形成是可能的,使得溶解区域在坑生长过程中几乎恒定。在隧道生长的锥形宽度制度中,隧道末端的ALCL_3浓度在模型方程中没有沉淀,隧道末端接近饱和。该模型表明,该条件来自集中溶液的低电导率,与钝化的敏感性相结合。

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