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The application of laser micro-machining technology in fiber optic sensing

机译：激光微加工技术在光纤传感中的应用

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Micromachining of optic fiber is one of the key technologies in the field of fiber optic sensing. In this paper, the progress of optic fiber machining has been discussed and our study in this field has been described. Because the main component of fiber optic materials is SiO_2 and the optic fibers are thin, small, hard and crisp, the results of micromachining of optic fiber are poor by using traditional methods. It is impossible to do the partial precise modification for optic fibers or make holes on them and therefore it is difficult to meet the needs of practical use. The newly deep ultraviolet light micromachining technology is the effective technology for the micromachining of optic fiber. By using excimer laser, the three-dimensional micromachining of fiber materials has been studied, and the results show that with the increase of the pulse laser energy, the etching width of the fiber grooves will increase and then keep unchanged after the pulse laser energy reaches a certain value. For the two-dimensional micromachining of fiber materials, it was found that the etching was related to the focused spot quality such as energy uniformity, scanning velocity and repetition frequency, which provides theoretical and technical preliminary for the direct micromachining of optic fiber using excimer laser. Fiber Bragg Grating (FBG) sensors are new sensors which developed in recently years and have important application in many fields. FBG is the key sensing element and can be prepared by the precise micro modification of fiber optic materials. In this paper, the study on the micromachining to change precisely the local refractive ratio of optic fiber materials with excimer laser has performed and FBG can be formed in this way. Various kinds of FBG including single mode, multimode, chirp and long period fiber grating have been prepared, and the FBG sensors for the detection of stress/strain, pressure, temperature, vibration have been manufactured and used in many fields such as bridges, petroleum chemistry, industry and civil construction, navigation.
机译：光纤微机械线是光纤感测领域的关键技术之一。本文已经讨论了光纤加工的进展，并描述了我们在该领域的研究。因为光纤材料的主要成分是SiO_2，光纤薄，小，硬，清脆，光纤微机械线的结果采用传统方法差。对于光纤进行部分精确改性是不可能的，或者在它们上制作孔，因此难以满足实际使用的需要。新深深的紫外线微加工技术是光纤微机械的有效技术。通过使用准分子激光，已经研究了纤维材料的三维微机械线，结果表明，随着脉冲激光能量的增加，纤维槽的蚀刻宽度将增加，然后在脉冲激光能量达到后保持不变一定的价值。对于纤维材料的二维微机械线，发现蚀刻与聚焦的点质量有关，例如能量均匀性，扫描速度和重复频率，这为使用准分子激光器提供了光纤直接微机械的理论和技术初步。光纤布拉格光栅（FBG）传感器是最近发展的新传感器，并且在许多领域具有重要应用。 FBG是关键传感元件，可以通过光纤材料的精确微观改性来制备。在本文中，可以以这种方式形成微机械线的研究精确改变光纤材料的局部屈光比和FBG。已经制备了各种FBG，包括单模，多模，啁啾和长时段光纤光栅，以及用于检测应力/应变，压力，温度，振动的FBG传感器已经制造，并用于许多领域，如桥梁，石油化学，工业和民用建设，航海。

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