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The application of laser micro-machining technology in fiber optic sensing

机译：激光微加工技术在光纤传感中的应用

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Micromachining of optic fiber is one of the key technologies in the field of fiber optic sensing. In this paper, the progress of optic fiber machining has been discussed and our study in this field has been described. Because the main component of fiber optic materials is SiO_2 and the optic fibers are thin, small, hard and crisp, the results of micromachining of optic fiber are poor by using traditional methods. It is impossible to do the partial precise modification for optic fibers or make holes on them and therefore it is difficult to meet the needs of practical use. The newly deep ultraviolet light micromachining technology is the effective technology for the micromachining of optic fiber. By using excimer laser, the three-dimensional micromachining of fiber materials has been studied, and the results show that with the increase of the pulse laser energy, the etching width of the fiber grooves will increase and then keep unchanged after the pulse laser energy reaches a certain value. For the two-dimensional micromachining of fiber materials, it was found that the etching was related to the focused spot quality such as energy uniformity, scanning velocity and repetition frequency, which provides theoretical and technical preliminary for the direct micromachining of optic fiber using excimer laser. Fiber Bragg Grating (FBG) sensors are new sensors which developed in recently years and have important application in many fields. FBG is the key sensing element and can be prepared by the precise micro modification of fiber optic materials. In this paper, the study on the micromachining to change precisely the local refractive ratio of optic fiber materials with excimer laser has performed and FBG can be formed in this way. Various kinds of FBG including single mode, multimode, chirp and long period fiber grating have been prepared, and the FBG sensors for the detection of stress/strain, pressure, temperature, vibration have been manufactured and used in many fields such as bridges, petroleum chemistry, industry and civil construction, navigation.
机译：光纤的微加工是光纤传感领域的关键技术之一。本文讨论了光纤加工的进展，并描述了我们在该领域的研究。由于光纤材料的主要成分为SiO_2，且光纤细，细，硬而脆，因此采用传统方法进行光纤微加工的结果较差。不可能对光纤进行部分精确的修改或在其上打孔，因此难以满足实际使用的需求。新近的深紫外光微细加工技术是光纤微细加工的有效技术。研究了利用准分子激光对纤维材料进行三维微加工的研究结果，结果表明，随着脉冲激光能量的增加，光纤沟槽的刻蚀宽度将逐渐增大，直至达到脉冲激光能量后，刻蚀宽度不变。一定的价值。对于纤维材料的二维微加工，发现刻蚀与聚焦点质量如能量均匀性，扫描速度和重复频率有关，这为准分子激光对光纤的直接微加工提供了理论和技术基础。 。布拉格光栅（FBG）传感器是近年来发展起来的新型传感器，在许多领域都有重要的应用。 FBG是关键的传感元件，可以通过对光纤材料进行精确的微改性来制备。本文进行了利用准分子激光进行微加工以精确改变光纤材料的局部折射率的研究，从而可以形成FBG。已经准备了包括单模，多模，线性调频和长周期光纤光栅在内的各种FBG，并且已经制造出用于检测应力/应变，压力，温度，振动的FBG传感器，并将其用于桥梁，石油等许多领域。化学，工业和民用建筑，导航。

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