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Capacitance Modeling of Short-Channel DG and GAA MOSFETs

机译:短通道DG和GAA MOSFET的电容建模

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摘要

Modeling of the intiinsic capacitances of short-channel, nanoscale DG and GAA MOSFETs is presented, covering a wide range of operation from subthreshold to strong inversion. In subthreshold, the electrostatics is dominated by the inter-electrode capacitive coupling, from which analytical expressions for the charge conserving trans- and self-capacitances of the DG device can readily be derived. Near and above threshold, the influence of the electronic charge is taken into account in a precise, self-consistent manner by combining suitable model expressions with Poisson's equation in the device body. The models are verified by comparison with numerical device simulations.
机译:提出了短通道,纳米级DG和GAA MOSFET的环境模拟,覆盖了从亚阈值到强反转的各种操作。在亚阈值中,静电学由电极间电容耦合支配,可以容易地推导出用于电荷节省的电荷节能和自电容的分析表达式。近乎且高于阈值,通过将合适的模型表达与装置体中的泊松等式组合,以精确的自我支撑的方式考虑电子电荷的影响。通过与数值设备模拟进行比较验证模型。

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