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Active and semi-active vibration control of ultrasonic bonding transducers

机译:超声波键合换能器的主动和半主动振动控制

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In ultrasonic wire bonding the required vibrations are generated by an ultrasonic transducer driven in its longitudinal mode. Asymmetries might lead to additional orthogonal motions, which lead to unwanted fluctuating normal forces in the friction contact. In this publication, a novel design of an ultrasonic transducer with control actuators is presented. The parasitic vibrations are damped by shunting the additional piezoelectric actuators by passive LR-networks. A Finite-Element model is developed to optimize the dimensions and the placement of the piezoceramics and to tune the electrical networks. Measurements are conducted on a prototype transducer which validate the simulation results.
机译:在超声波引线中,通过以其纵向模式驱动的超声换能器产生所需的振动。不对称可能导致额外的正交运动,这导致摩擦接触中的不希望的垂直力。在本出版物中,提出了一种具有控制致动器的超声换能器的新颖设计。通过被动LR网络通过分流附加的压电致动器来阻尼寄生振动。开发了有限元模型以优化压电陶瓷的尺寸和放置并调整电网。测量在原型换能器上进行,验证仿真结果。

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