• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Alternative Lithographic Technologies conference >High Volume Manufacturing of Nano Imprint Lithography produced devices: addressing the stamp supply challenge
【24h】

High Volume Manufacturing of Nano Imprint Lithography produced devices: addressing the stamp supply challenge

机译：纳米印记光刻生产装置的高批量生产：解决印花税供应挑战

获取原文
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In order to realize industrial level manufacturing using Nano Imprint Lithography, one of the key challenges is to supply stamps for the high volume machines. The master stamp is typically time consuming to produce and thus very expensive. It is therefore preferable to produce the maximum amount of replicated stamp from a master and to ensure that each stamp replica can deliver as many imprints as possible without losing yield. Currently, stamp replication is an area of intense development. How to produce a replicated a stamp and how many replicas that can be achieved from each master depend both on feature sizes, pattern density as well as aspect ratio of the structures. Several different techniques can be combined in order to obtain a large number of stamp replicas from each master. The ability to combine several different techniques enables the choice of the ideal technique suited for each structure type. This paper will focus on how to address stamp replication challenges in order to secure an adequate supply of stamps to enable high volume manufacturing with Nano Imprint Lithography. Results will be presented on the number of stamps that can be manufactured from each master as well as the lifetime of each individual stamp.
机译：为了实现使用纳米印记光刻的工业水平制造，其中一个关键挑战是为大量机器提供邮票。主邮票通常耗时，以产生，因此非常昂贵。因此，优选的是从母系中产生最大的复制印章，并确保每个印模复制品可以在不减去产率的情况下尽可能多地输送。目前，邮票复制是一个激烈的发展领域。如何生成复制的邮票以及可以从每个主设备实现的复制品依赖于特征大小，图案密度以及结构的宽高比。可以组合几种不同的技术，以便从每个主站获得大量的印章副本。结合几种不同技术的能力使得能够选择适合于每个结构类型的理想技术。本文将侧重于如何解决邮票复制挑战，以确保足够的邮票供应，以使高批量制造具有纳米印记光刻。结果将显示在每个主站和每个邮票的寿命中可以制造的邮票数量。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号