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Efficient TCAD methodology for ESD failure current prediction of smart power ESD protection

机译:高效的TCAD方法,用于ESD故障电流预测智能电源ESD保护

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This work deals with a method to predict ESD protection robustness with TCAD simulations. Tested on different devices and two smart power technologies, the results are validated with electrical measurement and failure analysis. Failure current is always predicted with a good accuracy compared to technology spreading. In addition, the methodology provides a significant simulation time speedup compared to classical methods based on a temperature criterion.
机译:这项工作涉及一种方法来预测与TCAD模拟的ESD保护鲁棒性。在不同的设备和两个智能电力技术上进行测试,结果验证了电气测量和故障分析。与技术扩展相比,始终预测失效电流始终以良好的准确度预测。此外,与基于温度标准的经典方法相比,该方法提供了显着的模拟时间加速。

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