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Fabrication of ethanol blended hydrogen peroxide 50 mN class MEMS thruster

机译：乙醇混合过氧化氢的制备50毫米MEMS推进器

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MEMS thruster with blended propellant was fabricated and experimentally tested in order to improve specific impulse of micro scale monopropellant thruster and to improve stability of thrust to be better. 90 wt. % H202 blended with 25 O/F ratio ethanol was used as propellant of thruster and platinum on alumina support was used as catalyst for decomposition of propellant. Thruster was made by five layers of photosensitive glasses. Four layers were integrated by thermal bonding method and catalyst was directly inserted into chamber before UV bonding process for the last layer bonding. Results of experimental tests showed ethanol blended hydrogen peroxide had higher specific impulse than unblended hydrogen peroxide. Expected improvement of thrust stability due to the blended propellant was found only in the transient state of thrust. Also, unlike the thrust instability of vertical type thruster of previous research, improvement of thrust stability was found owe to horizontal type thruster pattern on glass, despite aspect ratio limitation of glass fabrication with wet etching process. During the experimental test, combustion phenomena of ethanol with decomposed hydrogen peroxide were observed through glass layer and it made fracture on structure of thruster.
机译：制造和实验测试具有混合推进剂的MEMS推进器，以改善微观尺度单普利特推进器的特定脉冲，并提高推力的稳定性。 90 wt。将％H202与25 o / F比乙醇混合为推进器的推进剂，用氧化铝载体上的铂作为分解推进剂的催化剂。推进器由五层光敏眼镜制成。通过热粘合方法整合四层，在UV键合工艺之前，将催化剂直接插入腔室中，用于最后一层键合。实验试验结果显示出乙醇混合过氧化氢的特异性脉冲比未混合的过氧化氢。仅在推力的瞬态状态下发现了由于混合推进剂引起的推力稳定性的预期改善。此外，与先前研究的垂直型推进器的推力不稳定不同，玻璃上的水平型推进器图案发现推力稳定性的提高，尽管玻璃制造具有湿法蚀刻工艺的宽高比。在实验试验期间，通过玻璃层观察乙醇的燃烧现象具有分解过氧化氢的燃烧现象，并对推进器结构进行骨折。

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