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Controlled Patterning and Dimensional Control of Suspended Carbon Nanofibers

机译:悬浮碳纳米纤维的控制图案化和尺寸控制

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A simple and inexpensive top down approach to fabricate micro patterned carbon micro and nano-fibers has been developed combining Carbon-MEMS technology, Low Voltage Near-Field Electro spinning (LVNFES),and isotropic dry etching. A multitude of applications can take advantage of these patterned carbon nanofibers especially in the field of electrochemical sensors and nanoelectronics. In particular, we have developed a novel polymeric ink that exhibits excellent electro spinning capability in a LVNFES setup and that does survive the pyrolysis process. To illustrate the potential of this new ink, we have fabricated carbon fibers suspended on Carbon-MEMS structures. The fiber thickness can be controlled by adjusting the LVNFES voltage and using isotropic oxygen plasma based dry etching.
机译:已经开发了一种简单且廉价的顶部下沿着制造微型图案碳微纤维和纳米纤维的方法,结合了碳-MEMS技术,低压近场电纺丝(LVNFE)和各向同性干蚀刻。多种应用可以利用这些图案化的碳纳米纤维,特别是在电化学传感器和纳米电子领域中。特别是,我们开发了一种新型聚合物油墨,其在LVNFES设置中表现出优异的电纺能力,并且确实在热解过程中存活。为了说明这种新油墨的潜力,我们已经制造了碳纤维悬浮在碳 - MEMS结构上。可以通过调节LVNFES电压并使用基于各向同性氧等离子体的干蚀刻来控制纤维厚度。

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