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The Preparation and Characteristics Analysis of ZnO/Ni/ZnO Schottky Junction TFTs

机译:ZnO / Ni / Zno Schottky结TFTS的制备及特性分析

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Using radio frequency magnetron sputtering deposition deposit ZnO films on SiO_2 glass, and prepare vertical structure ZnO-based thin film transistor. By means of measurement, obtain the static output characteristics, the output current can achieve the order of milliampere, get the transfer characteristics of ZnO TFTs;;transconductance which get the largest value g_m=0.0061S when source-drain voltage V_(ds)=3V, source-gate V_(GS)=0.4V;;output resistance and voltage amplification coefficient, the smallest voltage amplification factor is u =1.16056,still have voltage amplification effect.
机译:在SiO_2玻璃上使用射频磁控溅射沉积沉积锌膜,并制备垂直结构ZnO基薄膜晶体管。通过测量,获得静态输出特性,输出电流可以达到毫安的顺序,获得ZnO TFT的传递特性;;跨导,当源极 - 漏极电压V_(DS)=时,得到最大值G_M = 0.0061S = 0.0061S 3V,源极门V_(GS)= 0.4V ;;输出电阻和电压放大系数,最小的电压放大系数是u = 1.16056,仍然具有电压放大效果。

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