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Development and Performance Evaluation of Fine Stage for 3-DOF Error Compensation

机译：三自由度误差补偿的细阶段的开发与绩效评估

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摘要

In this paper, a fine stage based on parallel mechanism was developed for 3-DOF error compensation to improve the form accuracy of the workpiece. This mechanism with 3-DOF motions in the plane was designed as the parallel structure for minimization and high structural stiffness. The static and dynamic stiffness analysis of the developed flexure-based mechanism have been conducted to verify the validity in displacement of workspace in the X- and Y-directions. For accurate positioning, the effect by Abbe's offset between the measuring and driving coordinate system was analyzed and minimized. The displacement of piezoelectric actuators was determined from the measured data and inverse kinematic. The performance of the developed fine stage was evaluated through the basic performance evaluation.
机译：在本文中，开发了基于并联机构的精细阶段，用于3-DOF误差补偿以提高工件的形式精度。该机构在该平面中具有3-DOF运动的机理设计为具有最小化和高结构刚度的平行结构。已经进行了发育的挠度机制的静态和动态刚度分析，以验证X和y方向上工作空间位移的有效性。为了准确定位，分析了测量和驱动坐标系之间的ABBE偏移的效果并最小化。压电致动器的位移由测量的数据和逆运动学确定。通过基本的性能评估评估所发达的细阶段的性能。

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