RESONANCE METHOD : AN ATTRACTIVE WAY TO EVALUATE MECHANICAL PROPERTIES OF THIN GOLD FILMS

机译：共振方法：评估薄金膜力学性能的有吸引力的方法

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Micromechanical test structures have been developed for evaluating mechanical properties of thin gold films. Using micromachining techniques, gold cantilever beams of different geometry (typically 40 to 100-μm-long, 2-μm-thick and around 1-μm-wide), were fabricated. These cantilevers were resonated by electrical excitation in a scanning electron microscope (SEM) and Young's modulus, Q-factor and fatigue properties were deduced from these experiments. The longest cantilevers showed a slight upward curvature which allowed the internal stress gradient to be evaluating.

机译：已经开发了用于评估薄金膜的机械性能的微机械测试结构。使用微机械化技术，制造不同几何形状的金悬臂梁（通常为40至100μm长，2μm厚，约为1μm宽）。这些悬臂通过在扫描电子显微镜（SEM）中的电激发产生谐振，并从这些实验中推断出Q系数和疲劳性能。最长的悬臂显示出略微向上曲率，使内应力梯度允许评估。

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《Symposium on microelectromechanical structures for materials research》|1998年||共6页
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RESONANCE METHOD : AN ATTRACTIVE WAY TO EVALUATE MECHANICAL PROPERTIES OF THIN GOLD FILMS

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