Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry

机译：横向剪切干涉法和白光扫描干涉法分析厚度相物体的变化

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摘要

The interferometric techniques of lateral shearing and white light scanning interferometry are combined to determine the variations of thickness of phase objects and the thickness of such objects is approximated through B-splines functions.

机译：组合横向剪切和白光扫描干涉法的干涉技术以确定相对象的厚度的变化，并且这些物体的厚度近似于B样条函数。

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《Iberoamerican Meeting on Optics;Latin American Meeting on Optics, Lasers, and Their Applications;International Commission for Optics Regional Meeting》|2004年||共6页
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Hernando R. Altamar; Arturo Plata;
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正文语种
中图分类应用光学;
关键词
white light interferometry; lateral shearing interferometry;

机译：白色光干涉测量;侧向剪切干涉测量法;

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专利

1. Sensitivity analysis of thin-film thickness measurement by vertical scanning white-light interferometry [J] . Jing-tao Dong, Rong-sheng Lu Applied optics . 2012,第23期

机译：垂直扫描白光干涉法测量薄膜厚度的灵敏度分析
2. Multi-scale analysis of high precision surfaces by Stylus Profiler, Scanning White-Light Interferometry and Atomic Force Microscopy [J] . N. Jouini, A. Gautier, P. Revel, International Journal of Surface Science and Engineering . 2009,第4期

机译：测针轮廓仪，扫描白光干涉仪和原子力显微镜对高精度表面进行多尺度分析
3. White light scanning interferometry adapted for large-area optical analysis of thick and rough hydroxyapatite layers [J] . Pecheva E, Montgomery P, Montaner D, Langmuir: The ACS Journal of Surfaces and Colloids . 2007,第7期

机译：适用于厚和粗糙羟基磷灰石层的大面积光学分析的白光扫描干涉仪
4. Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry [C] . Hernando R. Altamar, Arturo Plata Iberoamerican Meeting on Optics;Latin American Meeting on Optics, Lasers, and Their Applications;International Commission for Optics Regional Meeting . 2004

机译：横向剪切干涉法和白光扫描干涉法分析厚度相物体的变化
5. High-Speed White Light Interferometry for Imaging Applications [D] . Landsiedel, Emma Catherine 2019

机译：用于成像应用的高速白光干涉仪
6. Integrated Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry [O] . Gert Behrends, Dirk Stöbener, Andreas Fischer 2021

机译：基于横向扫描白色光干涉测量的集成散斑的位移测量
7. Integrated, Speckle-Based Displacement Measurement for Lateral Scanning White Light Interferometry [O] . Gert Behrends, Dirk Stöbener, Andreas Fischer 2021

机译：基于横向扫描白色光干涉测量的集成，散斑的位移测量
8. Coherence Properties of Broadband Optical Fields with Applications to White-Light Shearing Interferometry. [R] . idell,paul s. 1978

机译：宽带光场的相干特性及其在白光剪切干涉测量中的应用。

Analysis of variations of the thickness-phase objects by lateral shearing interferometry and white light scanning interferometry

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