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Fresnel Lenses: study and fabrication in silicon technology for medium-IR applications

机译：菲涅耳透镜：用于中红外应用的硅技术研究和制造

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摘要

Diffractive Fresnel Lenses (FL) were designed, fabricated and tested. The lens aims for increasing the sensitivity of a Non-Dispersive InfraRed (NDIR) silicon based optical gas system, focusing as much radiation as possible onto the detector. The studied wavelengths are 10.6μm and 3.4μm, which are the main absorption lines for ethylene and ethanol respectively. The lens diameter (5mm) and the focal length (4mm) are fixed by the detector package. Those diffractive lenses are compatible with the planar nature of silicon microtechnology. A theoretical study about the global lens efficiency as a function of the technological constrains and the process complexity has been carried out. Using only three photolithographic masks, eight quantization steps can be etched and a theoretical lens efficiency of 95% can be achieved. Once the devices were fabricated, the focal length and the spot size have been measured.
机译：衍射菲涅尔透镜（FL）的设计，制造和测试。该透镜旨在提高基于非分散红外（NDIR）硅的光学气体系统的灵敏度，将尽可能多的辐射聚焦到检测器上。研究的波长为10.6μm和3.4μm，分别是乙烯和乙醇的主要吸收线。镜头直径（5mm）和焦距（4mm）由探测器包装固定。那些衍射透镜与硅微技术的平面特性兼容。已经进行了关于作为技术约束和工艺复杂度的函数的全局透镜效率的理论研究。仅使用三个光刻掩模，可以蚀刻八个量化步骤，并且可以实现95％的理论透镜效率。一旦制造了器件，就已经测量了焦距和光斑尺寸。

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