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首页> 外文会议>Conference on MEMS, MOEMS and Micromachining >Fresnel Lenses: study and fabrication in silicon technology for medium-IR applications
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Fresnel Lenses: study and fabrication in silicon technology for medium-IR applications

机译：菲涅耳透镜：中红外IR应用中硅技术的研究和制造

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Diffractive Fresnel Lenses (FL) were designed, fabricated and tested. The lens aims for increasing the sensitivity of a Non-Dispersive InfraRed (NDIR) silicon based optical gas system, focusing as much radiation as possible onto the detector. The studied wavelengths are 10.6μm and 3.4μm, which are the main absorption lines for ethylene and ethanol respectively. The lens diameter (5mm) and the focal length (4mm) are fixed by the detector package. Those diffractive lenses are compatible with the planar nature of silicon microtechnology. A theoretical study about the global lens efficiency as a function of the technological constrains and the process complexity has been carried out. Using only three photolithographic masks, eight quantization steps can be etched and a theoretical lens efficiency of 95% can be achieved. Once the devices were fabricated, the focal length and the spot size have been measured.
机译：设计，制造和测试设计衍射菲涅耳透镜（FL）。 镜头旨在提高非分散红外（NDIR）基于基于硅气体系统的灵敏度，将尽可能多的辐射聚焦到检测器上。 所研究的波长为10.6μm和3.4μm，分别是乙烯和乙醇的主要吸收线。 透镜直径（5mm）和焦距（4mm）由检测器包固定。 那些衍射镜片与硅显微技术的平面性兼容。 已经进行了关于全局透镜效率作为技术限制的函数的理论研究，并进行了过程复杂性。 仅使用三个光刻掩模，可以蚀刻8个量化步骤，可以实现95％的理论透镜效率。 一旦制造了器件，已经测量了焦距和光斑尺寸。

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