• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>MEMS/MOEMS Components and Their Applications III >Large Stroke Actuators for Adaptive Optics
【24h】

Large Stroke Actuators for Adaptive Optics

机译：自适应光学系统大行程执行器

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

In this paper we review the use of a 3-dimensional MEMS fabrication process to prototype long stroke (>10 μm) actuators as are required for use in future adaptive optics systems in astronomy and vision science. The Electrochemical Fabrication (EFAB™) process that was used creates metal micro-structures by electroplating multiple, independently patterned layers. The process has the design freedom of rapid prototyping where multiple patterned layers are stacked to build structures with virtually any desired geometry, but in contrast has much greater precision, the capability for batch fabrication and provides parts in engineering materials such as nickel. The design freedom enabled by this process has been used to make both parallel plate and comb drive actuator deformable mirror designs that can have large vertical heights of up to 1 mm. As the thickness of the sacrificial layers used to release the actuator is specified by the designer, rather than by constraints of the fabrication process, the design of large-stroke actuators is straightforward and does not require any new process development. Since the number of material layers in the EFAB™ process is also specified by the designer it has been possible to gang multiple parallel plate actuators together to decrease the voltage required for long-stroke actuators.
机译：在本文中，我们回顾了在未来的天文学和视觉科学自适应光学系统中使用3D MEMS制造工艺来原型化长行程（> 10μm）执行器的原型。所使用的电化学加工（EFAB™）工艺通过电镀多个独立构图的层来创建金属微结构。该工艺具有快速原型设计的自由度，其中可以堆叠多个图案化的层以构建具有几乎任何所需几何形状的结构，但是相比之下，它具有更高的精度，批量制造的能力并提供工程材料（例如镍）。通过此过程实现的设计自由度已用于制造平行板和梳状驱动致动器可变形镜面设计，这些镜面可具有高达1 mm的大垂直高度。由于用于释放执行器的牺牲层的厚度是由设计人员指定的，而不是受制造过程的限制所指定的，因此大行程执行器的设计非常简单，不需要任何新的工艺开发。由于设计人员还指定了EFAB™工艺中的材料层数，因此可以将多个平行板致动器组合在一起以降低长行程致动器所需的电压。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号