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首页> 外文会议>MEMS/MOEMS Technologies and Applications II >Design considerations for Electrostatically tunable InP based Fabry-Perot filters for WDM applications
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Design considerations for Electrostatically tunable InP based Fabry-Perot filters for WDM applications

机译：用于WDM应用的基于静电可调式InP的Fabry-Perot滤波器的设计注意事项

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The use of micromachined tunable Fabry-Perot interferometers based on compound semiconductors with an integrated photodetector have earlier been proposed for fiber optic communications employing Wavelength Division Multiplexing (WDM) for wavelengths around 1.55 μm. The variation of the Fabry-Perot cavity length in these devices is achieved by electrostatic actuation induced movements of a Distributed Bragg Reflector (DBR) mirror suspended by beams. A new filter design has been proposed and its electrostatic actuation induced deflection has been investigated along with three different filter designs using Finite Element Analysis (FEA). Using a mathematical model, deflection is analytically calculated and compared with FEA results. Due to the way in which the mirror is integrated with suspending framework of beams, bending within the mirror during actuation cannot be averted. The filter's optical performance demands that mirror remain so flat that the maximum bending deflection is 1 nm for the mirror of given dimensions. Using a criterion based on mechanical and optical considerations the length of the beams suspending the mirror has been optimized for each of filter designs under investigation.
机译：早先有人提出将基于化合物半导体的微机械可调谐Fabry-Perot干涉仪与集成的光电检测器一起用于波长为1.55μm的波分复用（WDM）的光纤通信。在这些设备中，法布里-珀罗腔长度的变化是由静电激励引起的由光束悬挂的分布式布拉格反射器（DBR）反射镜的运动实现的。已经提出了一种新的滤波器设计，并使用有限元分析（FEA）研究了其静电致动偏转以及三种不同的滤波器设计。使用数学模型，可以计算挠度并与FEA结果进行比较。由于镜子与光束的悬挂框架集成在一起的方式，致动期间不能避免镜子内的弯曲。滤光镜的光学性能要求反射镜保持平坦，以使给定尺寸的反射镜的最大弯曲挠度为1 nm。使用基于机械和光学考虑的标准，针对所研究的每种滤光器设计，使悬挂镜子的光束的长度得到了优化。

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