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首页> 外文会议>MEMS/MOEMS Technologies and Applications II >Design of Electrostatically Levitated Micromachined Rotational Gyroscope Based on UV-LIGA Technology
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Design of Electrostatically Levitated Micromachined Rotational Gyroscope Based on UV-LIGA Technology

机译：基于UV-LIGA技术的静电悬浮微机械旋转陀螺仪设计

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The prevailing micromachined vibratory gyroscope typically has a proof mass connected to the substrate by a mechanical suspension system, which makes it face a tough challenge to achieve tactical or inertial grade performance levels. With a levitated rotor as the proof mass, a micromachined rotational gyroscope will potentially have higher performance than vibratory gyroscope. Besides working as a moment rebalance dual-axis gyroscope, the micromachined rotational gyroscope based on a levitated rotor can simultaneously work as a force balance tri-axis accelerometer. Micromachined rotational gyroscope based on an electrostatically levitated silicon micromachined rotor has been notably developed. In this paper, factors in designing a rotational gyro/accelerometer based on an electrostatically levitated disc-like rotor, including gyroscopic action of micro rotor, methods of stable levitation, micro displacement detection and control, rotation drive and speed control, vacuum packaging and microfabrication, are comprehensively considered. Hence a design of rotational gyro/accelerometer with an electroforming nickel rotor employing low cost UV-LIGA technology is presented. In this design, a wheel-like flat rotor is proposed and its basic dimensions, diameter and thickness, are estimated according to the required loading capability. Finally, its micromachining methods based on UV-LIGA technology and assembly technology are discussed.
机译：流行的微机械振动陀螺仪通常具有通过机械悬挂系统连接到基板的标准质量，这使其在获得战术或惯性等级性能水平方面面临艰巨的挑战。以悬浮转子作为检测质量，微机械旋转陀螺仪将具有比振动陀螺仪更高的性能。除了用作力矩平衡双轴陀螺仪之外，基于悬浮转子的微机械旋转陀螺仪还可以同时用作力平衡三轴加速度计。基于静电悬浮硅微机械转子的微机械旋转陀螺仪已得到显着发展。本文基于静电悬浮盘状转子设计旋转陀螺/加速度计的因素，包括微转子的陀螺作用，稳定的悬浮方法，微位移检测和控制，旋转驱动和速度控制，真空包装和微制造，被综合考虑。因此，提出了一种采用低成本UV-LIGA技术的带有电铸镍转子的旋转陀螺仪/加速度计的设计。在这种设计中，提出了一种轮状扁平转子，其基本尺寸，直径和厚度根据所需的负载能力进行估算。最后，讨论了基于UV-LIGA技术和组装技术的微加工方法。

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