• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>MEMS/MOEMS Technologies and Applications II >A Novel System To Measure MEMS Motion
【24h】

A Novel System To Measure MEMS Motion

机译：一种测量MEMS运动的新型系统

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

To provide useful insight into the reliability of silicon micromachined resonator, a measurement system of resonator vibration is presented to check the dynamic characteristics of resonator. The system utilizes heterodyne laser Doppler techniques and acquires the relation between resonator motion and Doppler shift of scatter beam. The vibration principle of resonator was expatiated detailedly and a special driving control circuit was also designed. Experiments on driving and measuring double-ended tuning fork vibration were carried out. The frequency of driving signal is 2.4 kHz and the peak-to-peak value of driving voltage is 140 V. Experimental results indicate that the system can measure dynamic characteristics of Micro-electro-mechanical system (MEMS) well.
机译：为了对硅微机械谐振器的可靠性提供有用的见识，提出了一种谐振器振动测量系统，以检查谐振器的动态特性。该系统利用外差激光多普勒技术，并获得了谐振器运动与散射光束的多普勒频移之间的关系。详细阐述了谐振器的振动原理，并设计了专用的驱动控制电路。进行了驱动和测量双音叉振动的实验。驱动信号的频率为2.4 kHz，驱动电压的峰峰值为140V。实验结果表明，该系统可以很好地测量微机电系统（MEMS）的动态特性。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号