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首页> 外文会议>International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology >Design, Development and Testing of Quartz Tuning Fork Temperature Sensor
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Design, Development and Testing of Quartz Tuning Fork Temperature Sensor

机译：石英音叉温度传感器的设计，开发和测试

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摘要

In this paper, a low cost quartz tuning fork temperature sensor adopting H-shaped tuning fork resonator to address miniaturization, high resolution and high stability has been designed, developed and tested. The quartz tuning temperature sensor is designed vibrating in flexural mode with a new thermo-sensitive cut. The quartz tuning fork temperature sensor consists of two prongs connected at one end of crystalline quartz plate with thin-film metal electrodes deposited on the faces, which is used to produce vibration in response to alternating voltages and detecting the resonance frequency in the meantime. When an external temperature is change, there is a shift in its natural frequency. Based on this principle, a resonant thermometer is designed. Finite element method is used to analyze the vibratory modes and optimize the structure. The whole structure is 500μm thickness, the length of tuning fork arm is 3076μm and the width of tuning fork arm is 600um, the frequency of tuning fork is about 37kHz with a sensitivity of rough 85 ppm/℃. The experimental results shown that a temperature accuracy of 0.01 ℃ and a resolution of 0.005 ℃ within temperature range from 0 ℃ to 100 ℃. All these research are helpful to design satisfactory performance of the sensor for temperature measurement.
机译：本文设计，开发和测试了一种采用H形音叉谐振器的低成本石英音叉温度传感器，以解决小型化，高分辨率和高稳定性的问题。石英调谐温度传感器采用新的热敏切口设计成在弯曲模式下振动。石英音叉温度传感器由两个插脚组成，该两个插脚在晶体石英板的一端连接有沉积在表面上的薄膜金属电极，用于响应交流电压产生振动并同时检测共振频率。当外部温度变化时，其固有频率也会发生变化。基于此原理，设计了一种共振温度计。有限元方法被用来分析振动模式并优化结构。整个结构厚度为500μm，音叉臂的长度为3076μm，音叉臂的宽度为600um，音叉的频率约为37kHz，灵敏度约为85 ppm /℃。实验结果表明，在0℃至100℃的温度范围内，温度精度为0.01℃，分辨率为0.005℃。所有这些研究有助于设计出令人满意的温度测量传感器性能。

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