A High Pressure Sensor with Circular Diaphragm Based on MEMS Technology

著录项

• 来源
  《International Conference of Chinese Society of Micro-Nano Technology;Annual Conference of the Chinese Society of Micro-Nano Technology》|2010年|p.206-211|共6页
• 会议地点 Xian(CN);Xian(CN)
• 作者

  Libo Zhao; Xudong Fang; Yulong Zhao; Zhuangde Jiang; Yong Li;

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• 作者单位

  State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China,State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory for Manufacturing Systems Engineering, Xi'an Jiaotong University, Xi'an 710049, China;

  State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类 光学仪器;微电子学、集成电路（IC）;
• 关键词

  pressure sensor; circular diaphragm; MEMS;

  机译：压力传感器;圆形膜片微机电系统;