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MEASUREMENT OF MECHANICAL PROPERTIES IN SMALL DIMENSIONS BY MICROBEAM DEFLECTION

机译：用微束偏转测量小尺寸的机械性能

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摘要

In this paper, we describe a technique for measuring elastic and plastic properties of thin films by microbeam deflection. The test procedure is similar to a macroscopic bending test where an external load is applied to a beam and its bending measured. Silicon oxide microbeams were made by different growth, lithography and etching techniques. The beams were then deflected with a nanoindenter, while the applied load and the displacement of the beam were recorded. Young's modulus was determined from the initial linear load-displacement behavior. Some beams were notched using a focused ion beam technique and loaded until brittle fracture occurred. These measurements permit the determination of the fracture toughness of the beam materials. In order to study plastic deformation in thin Ag films, the method was extended by depositing films onto the beams and measuring the behavior of the beam/film composite. Yielding of the Ag film was seen as a deviation from the linear-elastic behavior of the beam.
机译：在本文中，我们描述了一种通过微束偏转测量薄膜的弹性和塑性的技术。测试程序类似于宏观弯曲测试，在宏观弯曲测试中，将外部载荷施加到梁上并测量其弯曲。氧化硅微束通过不同的生长，光刻和蚀刻技术制成。然后用纳米压头使光束偏转，同时记录所施加的载荷和位移。杨氏模量由初始线性载荷-位移行为确定。使用聚焦离子束技术对一些束进行刻槽并加载，直到发生脆性断裂。这些测量结果可以确定梁材料的断裂韧性。为了研究Ag薄膜中的塑性变形，通过将膜沉积到梁上并测量梁/膜复合材料的性能来扩展该方法。 Ag薄膜的屈服被视为偏离光束的线弹性行为。

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  • 来源
  • 会议地点 San Francisco CA(US)
  • 作者

    O. KRAFT; R. SCHWAIGER; W.D. NIX;

  • 作者单位

    Max-Planck-Institut fuer Metallforschung, Seestr. 92, D-70174 Stuttgart, Germany;

    Max-Planck-Institut fuer Metallforschung, Seestr. 92, D-70174 Stuttgart, Germany;

    Department of Materials Science and Engineering, Stanford University, Stanford, CA 94305-2205;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 结构;材料;
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