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首页> 外文会议>Microelectronics Technology and Devices-SBMicro 2008 >Design of Disc-Shaped Tool in Electrochemical Removal of Displays' Color Filter Reclaim Process
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Design of Disc-Shaped Tool in Electrochemical Removal of Displays' Color Filter Reclaim Process

机译：电化学去除显示器滤色片回收过程中盘形工具的设计

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摘要

A new design system using a disc-shaped cathode as a tool electrode and electrochemical removal as a precision reclaiming process of ITO thin-film removal from optoelectronic flat panel displays' color filter surface is presented. The electrochemical machining just needs quite a short time to remove the ITO film easily and cleanly. In the current experiment, a large major axis of the disc-shaped cathode or a small minor axis of the disc-shaped cathode corresponds to a higher removal rate for the ITO thin-film. A large flow rate of the electrolyte, a higher temperature, a high rotational speed of the electrodes, or a higher concentration of the electrolyte corresponds to a higher removal rate for ITO thin-film. Pulsed direct current can improve the effect of dreg discharge and is advantageous to be associated with the fast feed rate of the workpiece, but this raises the current rating. A higher feed rate of displays' color filter combined with enough electric power produces fast electrochemical removal. rnThrough the ultra-precise removal of thin film microstructure, the semiconductor optoelectronic industry can effectively recycle defective products, reducing production costs.
机译：提出了一种新的设计系统，该系统使用盘形阴极作为工具电极，并采用电化学去除作为从光电平板显示器的彩色滤光片表面去除ITO薄膜的精确回收工艺。电化学加工仅需要很短的时间即可轻松，干净地去除ITO膜。在当前的实验中，圆盘状阴极的长轴或圆盘状阴极的短轴对应于ITO薄膜的较高去除率。电解质的大流量，较高的温度，电极的高旋转速度或电解质的较高浓度对应于ITO薄膜的较高去除率。脉冲直流电可以改善残渣放电的效果，并且有利于与工件的快速进给速率相关联，但是这会提高电流额定值。显示器的彩色滤光片的进给速度较高，再加上足够的电，可以快速去除电化学物质。通过超精密去除薄膜微结构，半导体光电行业可以有效地回收有缺陷的产品，从而降低生产成本。

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