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首页> 外文会议>Microelectronics Technology and Devices-SBMicro 2008 >Adjustment of Microwave Integrated Circuit (MIC) with Focused Ion Beam (FIB)
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Adjustment of Microwave Integrated Circuit (MIC) with Focused Ion Beam (FIB)

机译：用聚焦离子束（FIB）调整微波集成电路（MIC）

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摘要

Microwave Integrated Circuit (MIC) technology allows flexibility for customization design, reduced design cost and time-to-market, and adjusting capabilities not enable with MMIC circuits. Development of radio frequency (RF) devices requires adjusting pads and alternative circuit layouts connected with wire bonding. Circuits cutting are possible but it is coarse, with no precision and requires a costly metallic film deposition by sputtering process. We have developed a cheaper process by previous Ni-P deposition to improve Au film adhesion. However cutting circuits in adjustments became very difficult. Furthermore more complex RF devices may have critical circuits in which adjustment pads or alternative circuits highly influence the performance disenabling its use. Focused Ion Beam (FIB) by its accuracy allows circuit adjusting (milling circuit lines) with high accuracy. A dual coupler filter in a MIC technology was adjusted using this process. Results demonstrated adjustment is simple and precise in rnagreement with electromagnetically simulated circuits.
机译：微波集成电路（MIC）技术为定制设计提供了灵活性，降低了设计成本并缩短了上市时间，并提供了MMIC电路无法实现的调节功能。射频（RF）设备的开发需要调整焊盘和通过引线键合连接的替代电路布局。可以进行电路切割，但是它很粗糙，没有精度，并且需要通过溅射工艺进行昂贵的金属膜沉积。我们已经通过先前的Ni-P沉积开发出了一种更便宜的工艺，以改善Au膜的附着力。但是，在调整中切断电路变得非常困难。此外，更复杂的RF设备可能具有关键电路，其中的调节垫或替代电路会严重影响性能，从而无法使用它。聚焦离子束（FIB）的精确度可实现高精度的电路调整（铣削电路线）。使用此过程调整了MIC技术中的双耦合器滤波器。结果表明，与电磁仿真电路相一致，调节简单而精确。

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  • 来源
  • 会议地点 Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR);Gramado(BR)
  • 作者

    L. B. Zoccal; A. R. Vaz; S. D. Yamamoto; S. Moschkalev; J. A. Diniz; J. W. Swart;

  • 作者单位

    Center for Semiconductors Components, State University of Campinas, Brazil;

    Center for Semiconductors Components, State University of Campinas, Brazil;

    Center for Semiconductors Components, State University of Campinas, Brazil;

    Center for Semiconductors Components, State University of Campinas, Brazil;

    Center for Semiconductors Components, State University of Campinas, Brazil Faculty of Electric and Computer Engineering, State University of Campinas, Brazil;

    Faculty of Electric and Computer Engineering, State University of Campinas, Brazil Centre de Pesquisas Renato Archer, Campinas, Brazil;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 微电子学、集成电路（IC）;
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