Phase Behaviors of AIN Layers Grown on Si(111) Substrate by Metalorganic Chemical Vapor Deposition: A Transmission Electron Microscopy Study

著录项

• 来源
  《Microscopy Society of America Annual Meeting;Microanalysis Society Annual meeting;International Metallographic Society Annual meeting》|2012年|1636-1637|共2页
• 会议地点 Phoenix AZ(US)
• 作者

  Y.H. Kim; S.J. Ahn; Y.K. Noh; M.D. Kim; J.E. Oh;

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• 作者单位

  Korea Research Institute of Standards and Science, 1 Doryong-Dong, Yuseong-Gu, Daejeon 305-340, Republic of Korea;

  rnKorea Research Institute of Standards and Science, 1 Doryong-Dong, Yuseong-Gu, Daejeon 305-340, Republic of Korea;

  rnDepartment of Physics, Chungnam National University, 220 Gung-Dong, Yuseong-Gu, Daejeon 305-764, Republic of Korea;

  rnDepartment of Physics, Chungnam National University, 220 Gung-Dong, Yuseong-Gu, Daejeon 305-764, Republic of Korea;

  rnDivision of Electrical and Computer Engineering, Hanyang University, Ansan city, Kyunggi-do 425-791, Republic of Korea;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
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