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Novel optical sensors fabricated by Si micromachining

机译:通过硅微加工制造的新型光学传感器

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Abstract: In this study, three novel optical sensors are described. They are the pinhole integrated with the surrounding photodiode, the transmission type position sensor fabricated on the Si mesh structure, and the photodiode thinner than the optical wave length in the active layer. These sensors have unique optical functions as well as photodetection. These devices offer new concepts and easy construction of the optical systems to realize applications, which have been complicated or laborious in the conventional way. They are automatic alignment of the pinhole, detecting many points along a straight line, and detecting the intensity profile of the interference of the standing wave respectively. Each sensor absorbs only a part of the incident light beam and the rest passes through the sensor and enables to detect the information of the incident light beam not disturbing the optical field very much. The almost light beam continues to propagate to the down stream, and the transmitted beam can be used for the further function. !5
机译:摘要:在这项研究中,描述了三种新颖的光学传感器。它们是与周围的光电二极管集成在一起的针孔,在Si网状结构上制造的透射型位置传感器以及比有源层中的光波长薄的光电二极管。这些传感器具有独特的光学功能以及光电检测功能。这些设备为实现应用提供了新的概念,并且简化了光学系统的构造以实现应用,而这些应用在常规方式中既复杂又费力。它们是针孔的自动对准,沿直线检测多个点,并分别检测驻波干扰的强度分布。每个传感器仅吸收一部分入射光束,其余传感器通过传感器,并能够检测入射光束的信息,而不会对光场造成很大干扰。几乎光束继续向下游传播,并且透射光束可用于进一步的功能。 !5

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